High Intensity Heavy Ion Injector T-5010

The newly developed 10 mA, 50 keV heavy ion injector T-5010 is intended for use in isotope separators, ion implanters as well as autonomously for researches in the physics and technology of ion sources. It is complete with power supply, control, vacuum and cooling system. The injector layout is shown in Figure 1. The Freeman type ion source with four-electrode accel/decel system is set on the vacuum chamber /4/ equipped with movable Faraday cup for total beam current measurement. Two 950 l/s turbomolecular pumps are used for high vacuum pumping out. The injector power supply system is mounted in high voltage rack /10/ and control rack /1/. It is based on 50Hz/16kHz frequency conversion to provide the decrease of both size and weight of equipment. The 50kV, 20mA capacitive cascade generator /6/ is used as an accelerating voltage source. Ion source power supply, 25kV extracting voltage source and gas inlet system are mounted inside high voltage terminal /10/. The 16kHz insulating transformer with 50kV cable made secondary winding provides 3kW electric power transmitting to high voltage terminal. The optical/electronic converters with fibre optic cables are used for remote control and measuring the ion source parameters. All the power supply units are stabilized.